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3D Profile Measurement
3D Profile Measurement Using a Microscope |
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Profile Measurement Unit |
| 3D automatic profile measurement unit [Optional] |
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3D Profile Measurement* |
The VHX-600 creates a 3D image based on automatically captured images, and it calculates height profile data on a desired measuring line. Height, width and height difference data on the measuring line are plotted on a graph. Since the profile graph is related to the cursor position in the image display area, you can see the current measuring point easily.
* Function of the VHX-H2MK |
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| With the horizontal/vertical cursor, the height and width can be measured. The 2-line comparative mode can simultaneously display comparative analysis profile data on two parallel lines. |
Height Color/Scale Display* |
Color bars that indicate height are displayed on a 3D image. The highest position is displayed in red, and the lowest position is displayed in blue, allowing you to see a height difference at a glance. The height data can be superimposed on a raw image. Furthermore, the X-axis, Y-axis and Z-axis scales are calculated automatically and displayed according to the image size and the 3D rotation angle.
* Function of the VHX-H2MK |
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2-point Height Difference Measurement |
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| The VHX-600 can quickly and automatically measure a height difference between specified windows in the automatic measurement mode. In the manual measurement mode, you can measure a height difference between two points while monitoring the focus conditions. |
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Auto Focus Function |
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| This function helps everyone to perform highmagnification focus adjustment quickly and accurately. The auto focus function can be applied even to a target with uneven surface conditions, since the focusing area can be specified on the screen. |
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All-in-one SystemCentralized control of stage operation, observation and analysis
All steps from stage operation, zoom observation and 3-D analysis to image-saving and network connection are controlled in the VHX unit. You do not need a device or PC for stage operation or analysis. This system saves space and provides high operating efficiency. |
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