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Color 3D Laser Scanning Microscope

18000x Magnification & 0.001 µm 3D Measurement
COLOR 3D Laser Scanning Microscope VK-9700 Series
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Only the Laser Scanning Microscope can achieve a high level of examination and analysis.

Compare microscopes and realize what the VK-9700 can do.
  Optical
microscope
SEM Roughness
gauge
Laser Scanning
Microscope
VK-9700
No preprocessing
×
High definition
ultra-depth
examination
× ×
Color examination
× ×
3D dimensional
measurement
× ×
*Comparison with commonly used optical microscope, SEM and roughness gauge.


Optical microscope+SEM+Roughness gauge

High definition and ultra-depth [Sharpness comparable to SEMs]

Employs a short waveform violet laser. As well as enabling 18000x high definition magnification, the VK-9700 examines objects based on an ultra-depth image technique that focuses over the entire field of the microscope.
HEPA-Filter

Examination in real color [High definition with real color images]

Combining a short waveform laser and a white light source has enabled examination based on the HD real color ultra-depth image technique. This provides high definition images with color information.
Surface of color printing

Noncontact 3D measurement [High accuracy resolution of 0.00004 Mil (0.001 µm)]

The laser provides 3D data over the field of the microscope. It not only measures any type of object, noncontact 3D measurement enables high accuracy 3D analyses.
Optical sheet

Profile measurement

Measures height, width, dimensions, shape, angle and R of cross-sectional profiles of any lines or curves drawn on the screen.
Since the measurement point appears on the screen, high precision measurement results for any microscopic point can be easily obtained.
Height, Width and Cross-section measurement
Height, Width and Cross-section measurement
Angle and R measurement

Angle and R measurement
Electronic component (3000x)   Prism sheet (1000x)

Roughness measurement

Measures roughness of any lines or curves drawn on the screen or plane roughness of any specified area on the screen.
Features excellent capabilities such as noncontact measurement, magnification analysis of any measurement point and plane surface measurement.
These features give the VK-9700 an edge over traditional contact roughness gauges.
Line roughness measurement
Line roughness measurement
Surface roughness measurement
Surface roughness measurement
Catheter (1000x)   Metal surface (1000x)

3D measurement

Measures volume, surface area and ratio of area to surface area* of objects in any specified area on the screen.
* Ratio of area to surface area = ratio of area of a specified area to surface area of surface shape of an object.
Enables analyses unique to 3D measurement instruments.
Volume measurement
Volume measurement
Surface area measurement
Surface area measurement
Bump (2000x)   Color CCD (3000x)

Comparative measurement [Industry's First]

Displays cross-sectional profiles of two objects one on top of the other.
Differences in width, height and crosssections of two objects can be measured.
Enables comparative evaluation of objects before and after testing, whose variation with time or manufacturing conditions differ from each other.

Profile comparative measurement

LED pad(1000x)

3D display [Virtual trackball method]

Change the angle of an object by moving the mouse.
Data under examination appears on the screen in the 3D mode. The mouse can completely control the viewing angle, lighting angle, zoom level and Z-axis height.
free angle
360-degree examination from any direction. Examination at the most appropriate angle.
Bump
Bump (1000x)

Virtual trackball method

Scale change and zooming
Method that controls the virtual trackball (spherical body) whose center and diameter correspond with the center and diameter of an object displayed in the 3D mode.
Clicking a computer mouse fixes the cursor on the object and dragging the mouse rotates the virtual trackball.
The virtual trackball enables fine movement of the object.
Virtual trackball method

2D plus 3D measurement [Industry's First]

The measurement area of an object displayed on the screen using the 3D measurement method can be adjusted or set for both 2D and 3D images. Since the settings and adjustments are reflected on both images in real time, measurement data for the desired area can be obtained.
2D plus 3D
The measurement area can be adjusted both on 2D and 3D images.
Adjusting the measurement area moves the measurement point on both images in real time.

Examination and measurement software [VK-Viewer]

Just three steps to complete the measurement!
e Guidance shows the operation procedure and AAG automatically adjusts laser sensitivity. The VK-9700 simplifies complex operations of convenional laser microscopes. All that is required is to simply perform the basic operations of an optical microscope; Examination positioning, Adjustment of the peak and Pressing the measurement start button; just three steps. VK-Viewer allows beginners to obtain accurate measurement results easily.

e Guidance (Beginners mode) [Industry's First]

Three panel configuration: Flow chart panel, Guide panel and Operation panel.
Just follow the flow chart. It only takes three steps to complete the measurement.

1.Flow chart panel

Shows the three measurement steps in a flow chart.

2.Guide panel
Instructions for the three steps appear. Instructions change according to the selected step.

3.Operation panel
Panel for actual operation Instructions change according to the selected step.
e Guidance

Step1

Examination positioning
In order to get the view of a target to be examined, move the stage for targets and adjust the focal spot.
Examination positioning

Step2

Adjustment of the peak
Move the peak (focal spot) to the top and the bottom of a target and save the peak information in memory.
Adjustment of the peak

Step3

Measurement start
Press the measurement start button. The measurement will start. It automatically performs Laser sensitivity adjustment that once a troublesome task and affected the data accuracy. Additionally, this performs the measurement.
* Laser sensitivity can also be set manually.

Automatically adjusts the laser sensitivity. [World's first]
AAG detects laser reflection in the specified height range on high speed and sets this unit at the most appropriate light receiving sensitivity. Since AAG has automated conventional manual work, beginners can easily and accurately measure data.
Measurement start
     
Measurement complete
Just three steps completes the measurement. Beginners easily measure data at high speed.
  Measurement comple

Expert mode

Ideal for experienced operators
Graphical user interface arranges each setting item.
This is the ideal operation mode for experts who have intimate knowledge of each setting item and operation procedures.
Expert mode

New-generation analysis software [VK-Analyzer]

New document interface and WYSIWIG simplify the analyses.
The document interface allows multiple analysis results to be controlled and displayed within a single window.
WYSIWIG allows a user to output the currently working Window and simplify a series of operations. Work efficiency has been dramatically improved.

Tab document interface [Industry's First]

Allows multiple analyses results of a single image to be controlled within a single window. Clicking a tab changes the view.
Tab document interface
HDD components (1000X)

WYSIWYG [Industry's First]

WYSIWYG prints the analysis window to paper as it is displayed on the screen.
Information and design to be included on paper can be set and saved as desired.
 
What is WYSIWYG?
What You See Is What You Get. What a viewer sees on the screen is what a viewer gets on the printed paper.
Printed paper as a report

Output of image and numerical data

Image file
image file
Outputs image data BMP, TIFF, etc.
CSV file
CSV file
Outputs height or light intensity information as numerical data.
     
CAD file
CAD file
Outputs height data in STEP or ASC formats. CAD software compatible.
Video files
Video files
Saves 3D images as consecutive file (AVI file).

Beginners mode [Industry's First]

Just follow the procedure to analyze image data in the same way as the examination and measurement software VKVIEWER. Only the operations essential to each procedure appear on the screen. No operational problems should occur for beginners.
 
Step 1
Image processing

Preparation for data analysis Perform processing such as correction of measurement data slope.

Step 2
Measurement analysis

Perform measurement according to a selected analysis such as the cross-sectional profile or the roughness measurement.

Step 3
Output and completion of analysis

Outputs the analysis results. Select Print or Save.
Beginners mode

HD real color ultra-depth examination system [NEW]

The VK-9700 blends high definition and high contrast examination images obtained by scanning a short wavelength point light source with real color images obtained with a white light source. Each image can be viewed independently or combined for examination.
 
Light intensity image from laser light source

Light intensity image from laser light source
+
Color CCD unprocessed image from white light source
Color CCD unprocessed image from white light source
Color printing
HD real color ultra-depth images

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