 |
|
|
COLOR 3D Laser Scanning Microscope |
 |
|
 |
| 18000x Magnification & 0.001 µm 3D Measurement |
|
|
 Download Catalog |
|
Only the Laser Scanning Microscope can achieve a high level of examination and analysis.
Compare microscopes and realize what the VK-9700 can do. |
|
 |
| |
Optical
microscope |
SEM |
Roughness
gauge |
Laser Scanning
Microscope
VK-9700 |
No preprocessing |
○ |
× |
○ |
○ |
High definition
ultra-depth
examination |
× |
○ |
× |
○ |
Color examination |
○ |
× |
× |
○ |
3D dimensional
measurement |
× |
× |
△ |
○ |
*Comparison with commonly used optical microscope, SEM and roughness gauge.
|
|
High definition and ultra-depth [Sharpness comparable to SEMs] |
|
|
| Employs a short waveform violet laser. As well as enabling 18000x high definition magnification, the VK-9700 examines objects based on an ultra-depth image technique that focuses over the entire field of the microscope. |
|
|
Examination in real color [High definition with real color images] |
|
|
| Combining a short waveform laser and a white light source has enabled examination based on the HD real color ultra-depth image technique. This provides high definition images with color information. |
|
|
Noncontact 3D measurement [High accuracy resolution of 0.00004 Mil (0.001 µm)] |
|
|
| The laser provides 3D data over the field of the microscope. It not only measures any type of object, noncontact 3D measurement enables high accuracy 3D analyses. |
|
|
Profile measurement |
|
Measures height, width, dimensions, shape, angle and R of cross-sectional profiles of any lines or curves drawn on the screen.
Since the measurement point appears on the screen, high precision measurement results for any microscopic point can be easily obtained. |
|
Height, Width and Cross-section measurement
 |
|
Angle and R measurement
 |
| Electronic component (3000x) |
|
Prism sheet (1000x) |
Roughness measurement |
|
Measures roughness of any lines or curves drawn on the screen or plane roughness of any specified area on the screen.
Features excellent capabilities such as noncontact measurement, magnification analysis of any measurement point and plane surface measurement.
These features give the VK-9700 an edge over traditional contact roughness gauges. |
|
Line roughness measurement
 |
|
Surface roughness measurement
 |
| Catheter (1000x) |
|
Metal surface (1000x) |
3D measurement |
|
Measures volume, surface area and ratio of area to surface area* of objects in any specified area on the screen.
* Ratio of area to surface area = ratio of area of a specified area to surface area of surface shape of an object.
Enables analyses unique to 3D measurement instruments. |
|
Volume measurement
 |
|
Surface area measurement
 |
| Bump (2000x) |
|
Color CCD (3000x) |
Comparative measurement [Industry's First] |
|
|
Displays cross-sectional profiles of two objects one on top of the other.
Differences in width, height and crosssections of two objects can be measured.
Enables comparative evaluation of objects before and after testing, whose variation with time or manufacturing conditions differ from each other. |
Profile comparative measurement |
|
|
 |
3D display [Virtual trackball method] |
|
|
Change the angle of an object by moving the mouse.
Data under examination appears on the screen in the 3D mode. The mouse can completely control the viewing angle, lighting angle, zoom level and Z-axis height. |
|
 |
360-degree examination from any direction. Examination at the most appropriate angle.
Bump (1000x) |
Virtual trackball method |
|
|
Scale change and zooming
Method that controls the virtual trackball (spherical body) whose center and diameter correspond with the center and diameter of an object displayed in the 3D mode.
Clicking a computer mouse fixes the cursor on the object and dragging the mouse rotates the virtual trackball.
The virtual trackball enables fine movement of the object. |
|
 |
Textured image display |
|
|
Combines Light intensity and High-low images to provide a composite image which is easy to analyze.
|
Light intensity image
Displays high definition images of surface condition of an object |
 |
High-low image
Displays height information for an object visually in color shades so that an object can be easily examined. |
 |
CMP pad (1000x)
Textured 3D image that combines Light intensity and High-low images.
|
Lighting display |
|
|
3D images can be illuminated with pseudo-light when displayed on the screen.
Adjusting the angle of the light in accordance with an object shades microscopic irregularities on the surface of an object.
Lighting display makes the examination easy and enables the examination of a surface in the specified direction.
|
Solar battery (1000x)
 |
No lighting.
 |
 |
Lighted.
 |
2D plus 3D measurement [Industry's First] |
|
|
| The measurement area of an object displayed on the screen using the 3D measurement method can be adjusted or set for both 2D and 3D images. Since the settings and adjustments are reflected on both images in real time, measurement data for the desired area can be obtained. |
 |
The measurement area can be adjusted both on 2D and 3D images.
Adjusting the measurement area moves the measurement point on both images in real time. |
Examination and measurement software [VK-Viewer] |
|
|
Just three steps to complete the measurement!
e Guidance shows the operation procedure and AAG automatically adjusts laser sensitivity.
The VK-9700 simplifies complex operations of convenional laser microscopes.
All that is required is to simply perform the basic operations of an optical microscope; Examination positioning, Adjustment of the peak and Pressing the measurement start button;
just three steps. VK-Viewer allows beginners to obtain accurate measurement results easily. |
e Guidance (Beginners mode) [Industry's First] |
|
|
Three panel configuration: Flow chart panel, Guide panel and Operation panel.
Just follow the flow chart. It only takes three steps to complete the measurement.
1.Flow chart panel
Shows the three measurement steps in a flow chart.
2.Guide panel
Instructions for the three steps appear. Instructions change according to the selected step.
3.Operation panel
Panel for actual operation Instructions change according to the selected step. |
|
 |
Step1 |
|
|
Examination positioning
In order to get the view of a target to be examined, move the stage for targets and adjust the focal spot. |
|
 |
Step2 |
|
|
Adjustment of the peak
Move the peak (focal spot) to the top and the bottom of a target and save the peak information in memory. |
|
 |
Step3 |
|
|
Measurement start
Press the measurement start button. The measurement will start.
It automatically performs Laser sensitivity adjustment that once a troublesome task and affected the data accuracy. Additionally, this performs the measurement.
* Laser sensitivity can also be set manually.
Automatically adjusts the laser sensitivity. [World's first]
AAG detects laser reflection in the specified height range on high speed and sets this unit at the most appropriate light receiving sensitivity.
Since AAG has automated conventional manual work, beginners can easily and accurately measure data. |
|
 |
| |
|
|
Measurement complete
Just three steps completes the measurement. Beginners easily measure data at high speed. |
|
 |
Expert mode |
|
|
Ideal for experienced operators
Graphical user interface arranges each setting item.
This is the ideal operation mode for experts who have intimate knowledge of each setting item and operation procedures. |
|
 |
New-generation analysis software [VK-Analyzer] |
|
|
|
New document interface and WYSIWIG simplify the analyses.
The document interface allows multiple analysis results to be controlled and displayed within a single window.
WYSIWIG allows a user to output the currently working Window and simplify a series of operations. Work efficiency has been dramatically improved. |
|
WYSIWYG [Industry's First] |
|
|
|
WYSIWYG prints the analysis window to paper as it is displayed on the screen.
Information and design to be included on paper can be set and saved as desired. |
| |
What is WYSIWYG?
What You See Is What You Get. What a viewer sees on the screen is what a viewer gets on the printed paper. |
 |
|
Output of image and numerical data |
|
|
Image file
Outputs image data BMP, TIFF, etc. |
|
CSV file
Outputs height or light intensity information as numerical data. |
| |
|
|
CAD file
Outputs height data in STEP or ASC formats. CAD software compatible. |
|
Video files
Saves 3D images as consecutive file (AVI file). |
Beginners mode [Industry's First] |
|
|
|
| Just follow the procedure to analyze image data in the same way as the examination and measurement software VKVIEWER.
Only the operations essential to each procedure appear on the screen. No operational problems should occur for beginners.
|
| |
Step 1
Image processing
Preparation for data analysis Perform processing such as correction of measurement data slope.
Step 2
Measurement analysis
Perform measurement according to a selected analysis such as the cross-sectional profile or the roughness measurement.
Step 3
Output and completion of analysis
Outputs the analysis results. Select Print or Save. |
|
|
HD real color ultra-depth examination system [NEW] |
|
|
|
|
|
|
|
