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COLOR 3D Laser Scanning Microscope |
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| 18000x Magnification & 0.001 µm 3D Measurement |
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VK-9700 Series
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- 18000x Magnification & 0.001 μm 3D Measurement
- High definition and ultra-depth
- Examination in real color
- Noncontact 3D measurement
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 Download Catalog |
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Examination and Measurement Principles |
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| Employs Two Light Sources (Short Waveform Laser Light and a White Light Source) |
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Measurement principle
The VK-9700 employs two light sources: a Short waveform laser light source and a White light source.
Information about color, light intensity and height necessary to set color ultra-depth, light intensity ultra-depth and high-low images can be obtained by employing these two types of light sources. |
Pattern diagram of the measurement principle
Short waveform laser beams detect reflecting light intensity and height.
The VK-9700 scans the field of the microscope using a laser beam and an X-Y scan optical system.
The light receiving element detects reflecting light from each pixel in the field of view. Driving the objective lens in the Z-axis and scanning repeatedly obtains reflecting light intensity based on the Z position.
Height information is obtained and reflecting light intensity is detected while focusing on the peak position.
Consequently, the VK-9700 obtains data for omnifocal light intensity ultra-depth images and high-low images.
CCD camera obtains color information.
Reflecting light from the white light source is detected with a color CCD camera.
The CCD camera obtains color information at the peak (focus point) detected with the laser light source on a pixel basis.
The VK-9700 enables real color examination that SEMs are not capable of. |
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Description of obtained data
As the graph below shows, each pixel on a single plane (1024 X 768 pixels) obtains data for the reflecting light intensity (Intensity) based on the Z position.
The reflecting light intensive Z position (the peak), the reflecting light intensity at the Z position and its color information are obtained.
Three types of image data; Color ultra-depth, Light intensity ultra-depth and High-low are built based on the above information. |
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Three types of images built after the measurement
Color + light intensity information
Color ultra-depth image
Omnifocal color image that neither SEMs nor optical microscopes can provide.
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Light intensity information
Light intensity ultra-depth image
Black and white high contrast image that SEMs provide. Shows the reflectance differential on the surface of a target. |
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High-low information
High-low image
Image in which irregularity of a target is highlighted. |
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High accuracy measurement with the pin hole confocal optical system
Conventional pseudo-confocal optical systems that use a CCD as the light receiving element enable neither high accuracy measurement nor high definition examination owing to the reflecting light from points other than the peak (focal spot) or ambient light to adjacent pixels.
The pin hole confocal optical system has enabled high accuracy measurement and high definition examination by eliminating reflecting light from points other than the peak (focal spot) entirely. |
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Difference between the pin hole confocal optical system and conventional systems
The peak (Focal spot) detection of the pin hole confocal optical system and that of conventional systems.
Conventional optical systems receive reflecting light from points other than the peak (focal spot) and defocus images.
The pin hole confocal optical system receives reflecting light from the focal spot only.
The pin hole confocal optical system pinpoints the peak (focal spot) with high accuracy and provides focused, clear images only. |
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Image that a commonly used optical microscope provides
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Confocal image that VK-9700 system provides |
Neither defocused light nor flare can be removed.
Optical film (1000x) |
Provides focused image only while completely eliminating defocused light. |
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