Specifications |
| Best in Class Performance with the Specifications to Prove it |
 |
| Model |
Microscope |
VK-9710 |
VK-8710 |
| Controller |
VK-9700 |
VK-8700 |
| Magnification of a 15" monitor |
200 |
400 |
1000 |
3000 |
200 |
400 |
1000 |
2000 |
| Magnification of objective lens |
10x |
20x |
50x |
150x |
10x |
20x |
50x |
100x |
| Observation/measuring range (1) |
Horizontal (H): Mil μm |
52.65"
1350 |
26.33"
675 |
10.53"
270 |
3.51"
90 |
52.65"
1350 |
26.33"
675 |
10.53"
270 |
5.27"
135 |
| Vertical (H): Mil μm |
39.47"
1012 |
19.92"
506 |
7.88"
202 |
2.61"
67 |
39.47"
1012 |
19.92"
506 |
7.88"
202 |
3.94"
101 |
| Operating distance: inch mm |
0.65"
16.5 |
0.12"
3.1 |
0.01"
0.35 |
0.008"
0.2 |
0.65"
16.5 |
0.12"
3.1 |
0.02"
0.54 |
0.01"
0.3 |
| Numeric Apertures (N.A) |
0.3 |
0.46 |
0.95 |
0.95 |
0.3 |
0.46 |
0.8 |
0.95 |
| Optical system for observation/measurement |
Pinhole confocal optical system |
Pinhole confocal optical system |
| Height measurement |
Measuring range |
0.28" 7 mm |
0.28" 7 mm |
| Display resolution |
0.00004 Mil 0.001 μm |
0.0004 Mil 0.01 μm |
| Repeatability σ |
0.0008 Mil 0.02 μm (2) |
0.001 Mil 0.03 μm (3) |
| Width measurement |
Display resolution |
0.00004 Mil 0.001 μm |
0.0004 Mil 0.01 μm |
| Repeatability 3σ |
0.0008 Mil 0.02 μm (4) |
0.001 Mil 0.03 μm (5) |
| Frame rate (Hz) |
Pixel count |
2048 x 1536, 1024 x 768 |
2048 x 1536, 1024 x 768 |
| For monochrome image |
14 bit |
14 bit |
| For color image |
8 bit for RGB each |
8 bit for RGB each |
| For height measurement |
24 bit |
20 bit |
| Optical zoom |
1 x to 6 x |
1 x to 6 x |
| Auto function |
AAG (Auto gain), Auto focus, RPD |
AAG (Auto gain), Auto focus, RPD |
Laser beam light
source for measurement |
Waveform |
Violet laser, 408 nm |
Red laser 658 nm |
| Maximum output |
0.9 mW |
0.9 mW |
| Class |
JIS Class 2 (C6802) |
JIS Class 2 (C6802) |
| Light-receiving element |
PMT
(Photoelectron Multiplier Tube) |
PMT
(Photoelectron Multiplier Tube) |
| Light source for optical observation |
Lamp |
100 W halogen lamp |
100 W halogen lamp |
| Color camera for optical observation |
Image pickup device |
Color CCD image sensor |
Color CCD image sensor |
| Auto adjustment |
Gain, Shutter speed |
Gain, Shutter speed |
| Data processing unit |
Dedicated PC, supplied by KEYENCE
with the VK-9700
(OS: Windows XP) (6) |
Dedicated PC, supplied by KEYENCE with the
VK-8700
(OS: Windows XP) (6) |
| Weight |
Microscope |
Approx. 26 kg
(Measuring head detached:
approx. 10 kg) |
Approx. 25 kg
(Measuring head detached:
approx. 8.5 kg) |
| Controller |
Approx. 11 kg |
Approx. 11 kg |
|
1. The observation/measuring range is the minimum visual field range.
2. When a standard height difference of 0.08 Mil (2 µm) is measured with the 50x objective lens.
3. When a standard height difference of 0.08 Mil (2 µm) is measured with the 100x objective lens.
4. When the KEYENCE reference chart line width of 0.04 Mil (1 µm) is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
5. When the KEYENCE reference chart line width of 0.04 Mil (1 µm) is measured with the 100x objective lens in line peak mode (image averaging: 8 times).
6. WindowsXP is registered trademarks of Microsoft, U.S.A.
|
