SEM-like Resolution & Depth of Field
High Z-axis Resolution
0.053 μm 0.002 Mil standard step sample measurement result
Resolution determines the precision to which measurements can be made and is a measuring instrument's most important performance parameter. The VK-X Laser Scanning Microscope's ultra-precise 0.5 nm resolution is 20 times higher than conventional systems, allowing for measurement with a much greater level of precision.
Better observation ability
Backside of a wafer (1000x)
The VK-X Series uses the new OTC (Optimized Texture Contrast) and C-Laser DIC* Display functions to clearly observe target objects with shapes and textures too minute for conventional models by combining the laser image and height information. This enables effective observation of target objects previously difficult to observe when using contrast information, such as mirrored samples and samples with little variation in surface texture. It lets you observe nano-level indentations and projections, which were difficult to see with conventional laser microscopes. Users can perform differential observation and profile measurement without the need to remove and insert prisms or filters.
*DIC = Differential Interference Contrast
Sharp, high-definition images comparable to SEMs
The VK-X is able to perform high-resolution observation at magnifications of up to 24,000x. Since the system scans through multiple focal layers of a target, it is able to capture an image that is entirely in focus throughout the observation field.
High definition with real color images
HD real-color observation
By using a short-wavelength laser and white light source, the VK-X Series Laser Scanning Microscopes are able to provide images with much higher resolution and definition when compared to conventional light microscopes. The VK-X is able to achieve a spatial resolution of 120 nm, while white light systems generally have a resolution of approximately 400 nm. When combined with the image from the white light source, the VK-X generates a high-resolution laser image with true color information.
