Charterize Highly-Anglular Surfaces

Ability to measure minute steps and steep angles

Z-axis resolution/angular characterization

The VK-X Laser Scanning Microscope has enhanced the basic performance of conventional systems by improving the measurement limit for minute steps/shapes and increasing the tracking capability for shapes with steep angles. Since the VK-X Series is calibrated using traceable standards, the measurements are very accurate.

High numerical aperture lenses: A must for high precision

APO (Apochromatic) lens with high numerical aperture

The VK-X Series uses APO lenses with a numerical aperture (N.A.) of up to 0.95, one of the highest N.A. values of any air-based optical lens. The higher the numerical aperture of the objective lens, the greater the measureable angle limit. The 3D images above show how the VK-X Series is able to capture more data at the periphery on samples with sharp angles while minimizing data loss.

Wide selection of objective lenses

A wide variety of high-resolution lenses are available, including high N.A., long focal distance and APO, with objective lens magnifications between 5x - 150x.