Thickness Measurements

Area Film Thickness Measurement function

Analyze multiple layers at all points in the observation field. You can display 3D images and cross-section profiles of a selected single layer or multiple layers, and measure shapes or film thicknesses of user-specified locations.

In the case of transparent targets, transmitted light goes through the peak (focal point) on the front face and detects the peak (focal point) on the rear face. The difference in both peak positions can be measured (film thickness).

Measuring transparent objects

Transparent Top Surface Observation function

Transparent Top mode is a new function added to the VK Series which acquires information on the outermost surface of a transparent object, while being unaffected by light that reflects from other layers within a target.