Specifications
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| Model | Microscope | VK-X210 | VK-X110 | VK-X105 | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Controller | VK-X200K | VK-X100K | VK-X100K | ||||||||||
| Magnification of a 15" monitor | 200x | 400x | 1000x | 3000x | 200x | 400x | 1000x | 2000x | 100x | 200x | 400x | 1000x | |
| Objective lens magnification | 10x | 20x | 50x | 150x | 10x | 20x | 50x | 100x | 5x | 10x | 20x | 50x | |
| Observation/measuring range (1) | Horizontal (H): Mil μm | 1350 53.15 |
675 26.57 |
270 10.63 |
90 3.54 |
1350 53.15 |
675 26.57 |
270 10.63 |
135 5.31 |
2700 106.30 |
1350 53.15 |
675 26.57 |
270 10.63 |
| Vertical (H): Mil μm | 1012 39.84 |
506 19.92 |
202 7.95 |
67 2.64 |
1012 39.84 |
506 19.92 |
202 7.95 |
101 3.98 |
2025 79.72 |
1012 39.84 |
506 19.92 |
202 7.95 |
|
| Working distance: inch mm | 16.5 0.65" |
3.1 0.12" |
0.35 0.01" |
0.2 0.008" |
16.5 0.65" |
3.1 0.12" |
0.54 0.02" |
0.3 0.01" |
22.5 0.89" |
16.5 0.65" |
3.1 0.12" |
0.54 0.02" |
|
| Numerical Aperture (N.A) | 0.3 | 0.46 | 0.95 | 0.95 | 0.3 | 0.46 | 0.8 | 0.95 | 0.13 | 0.3 | 0.46 | 0.8 | |
| Optical zoom | 1x to 8x | ||||||||||||
| Total magnification | 200x to 24000x | 200x to 16000x | 100x to 8000x | ||||||||||
| Optical system for observation/measurement | Pinhole confocal optical system | ||||||||||||
| Height measurement | Measuring range | 7 mm 0.28" | 7 mm 0.28" | 7 mm 0.28" | |||||||||
| Display resolution | 0.0005 μm 0.00002 Mil | 0.0005 μm 0.00002 Mil | 0.0005 μm 0.00002 Mil | ||||||||||
| Repeatability σ | 0.012 μm 0.0005 Mil (2) | 0.02 μm 0.0008 Mil (2) | 0.02 μm 0.0008 Mil (2) | ||||||||||
| Width measurement | Display resolution | 0.001 μm 0.00004 Mil | 0.01 μm 0.0004 Mil | 0.01 μm 0.0004 Mil | |||||||||
| Repeatability 3σ | 0.02 μm 0.0008 Mil (3) | 0.03 μm 0.001 Mil (4) | 0.05 μm 0.002 Mil (5) | ||||||||||
| Frame memory | Pixel count | 2048 x 1536, 1024 x 768, 1024 x 64 | |||||||||||
| For monochrome image | 16-bit | ||||||||||||
| For color image | 8-bit for RGB each | ||||||||||||
| For height measurement | 24 bit | 21-bit | 21-bit | ||||||||||
| Frame rate (8) | Surface scan | 4 Hz to 120 Hz | |||||||||||
| Line scan | 7900 Hz | ||||||||||||
| Auto function | AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings | ||||||||||||
| Laser beam light source for measurement | Waveform | Violet laser, 408 nm | Red semiconductor laser, 658 nm | ||||||||||
| Output | 0.95 mW | ||||||||||||
| Laser Class | Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 (6)) | ||||||||||||
| Laser light-receiving element | PMT (Photoelectron Multiplier Tube) | ||||||||||||
| Light source for optical observation | Lamp | 100 W halogen lamp | |||||||||||
| Color camera for optical observation | Imaging element | 1/3" Color CCD image sensor | |||||||||||
| Recording resolution | Super high resolution (3072×2304) | ||||||||||||
| Auto adjustment | Gain, Shutter speed | ||||||||||||
| Data processing unit | Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) (7) | ||||||||||||
| Power supply | Power-supply voltage | 100 to 240 VAC, 50/60 Hz | |||||||||||
| Current consumption | 450 VA max. | ||||||||||||
| Weight | Microscope | Approx. 26 kg (Measuring head detached: approx. 10 kg) |
Approx. 25 kg (Measuring head detached: approx. 8.5 kg) |
Approx. 25 kg (Measuring head detached: approx. 8.5 kg) |
|||||||||
| Controller | Approx. 11 kg | ||||||||||||
1. The observation/measuring range is the minimum visual field range.
2. When a standard height difference of 2 µm 0.08 Mil is measured with the 50x objective lens.
3. When the KEYENCE reference chart line width of 1 µm 0.04 Mil is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
4. When the KEYENCE reference chart line width of 1 µm 0.04 Mil is measured with the 100x objective lens in line peak mode (image averaging: 8 times).
5. When the KEYENCE reference chart line width of 1 μm 0.04 Mil is measured with the 50x objective lens (optical zoom 2x) in line peak mode (image averaging: 8 times).
6. The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50.
7. Windows 7 is a registered trademark of Microsoft, U.S.A.
8. At top speed when using a combination of measurement mode/measurement quality/lens magnification. When line scan has a measurement pitch that is within 0.1 μm.
2. When a standard height difference of 2 µm 0.08 Mil is measured with the 50x objective lens.
3. When the KEYENCE reference chart line width of 1 µm 0.04 Mil is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
4. When the KEYENCE reference chart line width of 1 µm 0.04 Mil is measured with the 100x objective lens in line peak mode (image averaging: 8 times).
5. When the KEYENCE reference chart line width of 1 μm 0.04 Mil is measured with the 50x objective lens (optical zoom 2x) in line peak mode (image averaging: 8 times).
6. The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50.
7. Windows 7 is a registered trademark of Microsoft, U.S.A.
8. At top speed when using a combination of measurement mode/measurement quality/lens magnification. When line scan has a measurement pitch that is within 0.1 μm.
System Configuration
